1-2
Brooks
®
Digital MFC's & MFM's
Section 1 Introduction
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
April, 2013
Reduced Cost of Ownership
The SLA5800 Series allows multi-gas and multi-range capabilities to
reduce customer inventory. Storage and pre-programming of up to 10 gas
calibrations easily permits users to switch between different gases and
ranges on a single device.
1-4 Specifications
PERFORMANCE CHARACTERISTICS:
Flow Ranges
Models SLA5850/SLA5860 - Any FS range from 0-3 ccm to 0-50 lpm (N
2
eq.)
Models SLA5851/SLA5861 - Any FS range from 20-100 lpm (N
2
eq.)
Up to 200 lpm H
2
flows possible
Models SLA5853/SLA5863 - Any FS range from 100-2500 lpm (N
2
eq.)
Control Range
Turndown: 50:1
Turndown: 100:1 with Coplanar valve option
( for any FS range from 1-50 lpm (N
2
eq.)
Accuracy (N
2
eq. at calibration conditions)
±1.0% of rate (20% - 100% FS)
±0.2% FS (below 20% FS) up to 1200 lpm
(Optional: ±0.7% of rate ±0.2% FS ("S-Series") up to
1200 lpm
Flow ranges above 1200 lpm and up to 2500 lpm: ±1.0% of full scale
Repeatability
±0.20% of rate
Settling Time/Response Time
< 1 second to within ±2% FS of final value for a
0-100% command step (better on request)
for flow rates up to 100 lpm N
2
Eq.
< 3 seconds to within ±2% FS of final value for a
0-100% command step (better on request)
for flow rates greater than 100 lpm (N
2
eq.) up to 2500 lpm (N
2
eq.)
Sensitivity to Mounting Attitude
< 0.2% FS maximum deviation from specified accuracy, after rezeroing.
RATINGS:
Temperature Sensitivity
Zero: less than 0.05% FS per °C
Span: less than 0.1% of rate per °C
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