Brooks SLA585 - Model SLA5850 F Digital I;O FOUNDATION Fieldbus MFC with Coplanar Valve

1-12
Brooks
®
Digital MFC's & MFM's
Section 1 Introduction
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
April, 2013
Figure 1-8 Model SLA5851D Digital I/O DeviceNet MFC
Figure 1-7 Model SLA5850F Digital I/O F
OUNDATION Fieldbus MFC with Coplanar Valve