Brooks SLA585 - Default Chapter; Table of Contents

i
Brooks
®
Digital MFC's & MFM's
Contents
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
April, 2013
Paragraph Page
Number Number
Section 1 Introduction
1-1 Scope .........................................................................................................................................1-1
1-2 Purpose ......................................................................................................................................1-1
1-3 Description .................................................................................................................................1-1
1-4 Specifications .............................................................................................................................1-2
Section 2 Installation
2-1 General ......................................................................................................................................2-1
2-2 Receipt of Equipment.................................................................................................................2-1
2-3 Recommended Storage Practice ...............................................................................................2-1
2-4 Return Shipment ........................................................................................................................2-2
2-5 Transit Precaution ......................................................................................................................2-2
2-6 Removal from Storage ...............................................................................................................2-2
2-7 Gas Connections........................................................................................................................2-2
2-8 In-Line Filter ...............................................................................................................................2-3
2-9 Installation ..................................................................................................................................2-3
2-10 Electrical Interface......................................................................................................................2-5
2-11 Operation Check Procedure (Analog I/O) ..................................................................................2-9
2-12 Digital I/O: DeviceNet or FOUNDATION Fieldbus .........................................................................2-10
2-13 DeviceNet I/O Assemblies.........................................................................................................2-10
Section 3 Operation
3-1 Overview ....................................................................................................................................3-1
3-2 Theory of Operation for Flow Measurement ..............................................................................3-1
3-3 Features .....................................................................................................................................3-2
3-4 Analog I/O Mode of Operation....................................................................................................3-4
3-5 Communications Features .........................................................................................................3-6
3-5-1 RS-485 Communications Features (Analog versions only) ........................................................3-6
3-5-2 RS-485 DeviceNet Communications Features ..........................................................................3-7
3-5-3 RS-485 FOUNDATION Fieldbus Communications Features .........................................................3-7
3-6 Alarms and Warnings (Analog versions only) ............................................................................3-8
3-6-1 Alarms and Warnings (Analog versions only) ............................................................................3-8
3-6-2 Diagnostic Alarms (Analog versions only) .................................................................................3-10
3-6-3 General Alarms and Warnings (Analog versions only) .............................................................. 3-11
3-7 Calibration/Configuration Sets...................................................................................................3-12
3-8 Special Features ....................................................................................................................... 3-13
3-8-1 Setpoint Ramping......................................................................................................................3-13
3-8-2 Low Setpoint Command Cutoff .................................................................................................3-13
3-8-3 Low Flow Output Cutoff.............................................................................................................3-13
3-8-4 Flow Output Damping ...............................................................................................................3-13
3-8-5 Adaptive Control ........................................................................................................................3-13
3-8-6 Flow Totalizer ............................................................................................................................3-13
3-8-7 Flow Output Conditioning ..........................................................................................................3-13
3-8-8 Flow Signal Lock-in ...................................................................................................................3-14
3-9 PC-based Support Tools ...........................................................................................................3-14