Brooks Smart Series - Table of Contents

Installation and Operation Manual
X-TMF-5800S-MFC-eng
PN 541-C-051-AAG
November, 2008
Models 5800-S
4
Table of Contents
Section 1:Introduction ......................................................................................................................................... 5
1.1 Purpose ........................................................................................................................................... 5
1.2 How to use this Manual.................................................................................................................... 5
1.3 Description....................................................................................................................................... 6
Section 2: Installation ......................................................................................................................................... 9
2.1 General ............................................................................................................................................ 9
2.2 Receipt of Equipment ....................................................................................................................... 9
2.3 Recommended Storage Practice .....................................................................................................10
2.4 Return Shipment .............................................................................................................................10
2.5 Gas Connections ............................................................................................................................10
2.6 Mechanical Installation....................................................................................................................11
2.7 IN-LINE Filter .................................................................................................................................. 11
2.8 Electrical Interfacing ........................................................................................................................12
2.9 Digital Communication ....................................................................................................................14
2.10 Interconnection..............................................................................................................................16
Section 3: Operation ..........................................................................................................................................19
3.1 Operating Procedure .......................................................................................................................19
3.2 Zero Adjustment ..............................................................................................................................19
3.3 Calibration Procedure ......................................................................................................................19
Section 4: Maintenance .....................................................................................................................................20
4.1 General ...........................................................................................................................................20
4.2 Troubleshooting and System checks...............................................................................................20
4.3 Cleaning Procedures .......................................................................................................................23
4.4 Calibration Procedure ......................................................................................................................23
4.5 Valve (Dis)Assembly Procedure .....................................................................................................23
Section 5: Specification........................................................................................................................................24
Appendix A: Gas Conversion Tables .....................................................................................................................28
Appendix B: Dimensional drawings ......................................................................................................................32
Appendix C:Translation of CE Marking electrical installation instructions..............................................................34
Appendix D: Important Safety Instructions............................................................................................................39
Appendix E: Modellist .........................................................................................................................................44
Figures
Figure 2-1: Open Collector ...................................................................................................................................13
Figure 2-2: p.c. boards with the locations of jumper switches Note: Switch number 1 is the switch at the bottom 14
Figure 2-3: RS-232 interconnection of TMF and PC..............................................................................................16
Figure 2-4: RS-485 multidrop interconnection TMFs and PC.................................................................................16
Figure 2-5: TMF/C to Read-out cable ...................................................................................................................17
Figure 2-6: TMF/C Read-out and pc .....................................................................................................................17
Tables
Table 1-1: Flow ranges per model .......................................................................................................................... 6
Table 2-1: Electrical interfacing. Smart TMF ........................................................................................................12
Table 2-2: Dipswitch settings ...............................................................................................................................15
Table 2-3: Electrical interfacing. Smart TMF cable...............................................................................................18
Table 4-1: Troubleshooting ...................................................................................................................................22
Table 5-1: Flow ranges and pressure ratings ........................................................................................................25
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