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EPFL–STI–CMi
DEKTAKXT
MECHANICALPROFILOMETER
The DektakXT stylus surface profiler is an advanced thin and thick film step height
measurement tool with the following characteristics:
- equipment compatible with 2”, 4”, 6” and 8’’ wafers
- Selectable magnification, 1 to 4mm FOV
- Scan Length Range 55 mm with stitching option
- Vertical range 1 mm
- step-height repeatability of 5A
- N-Lite+ Low Force with 0.03 to 15mg
- 3D stress and 3D mapping
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