Bruker DektakXT Manual

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EPFL–STI–CMi
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DEKTAKXT
MECHANICALPROFILOMETER
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The DektakXT stylus surface profiler is an advanced thin and thick film step height
measurement tool with the following characteristics:
- equipment compatible with 2”, 4”, 6” and 8’’ wafers
- Selectable magnification, 1 to 4mm FOV
- Scan Length Range 55 mm with stitching option
- Vertical range 1 mm
- step-height repeatability of 5A
- N-Lite+ Low Force with 0.03 to 15mg
- 3D stress and 3D mapping

Bruker DektakXT Specifications

General

Type	Surface Profiler
Technique	Contact Profilometry
Measurement Range (Horizontal)	Up to 55 mm
Vertical Measurement Range	Up to 1 mm
Vertical Resolution	0.1 nm
Maximum Scan Length	55 mm
Data Acquisition Rate	Up to 1000 Hz
Software	Vision64
Z-Range	1 mm
Scan Length	50um - 55mm
Scan Speed	0.01 mm/s to 10 mm/s
Stylus Force	1 mg to 15 mg
Stylus Tip Radius	2 μm
Stage	Motorized stage