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Type | Surface Profiler |
---|---|
Technique | Contact Profilometry |
Measurement Range (Horizontal) | Up to 55 mm |
Vertical Measurement Range | Up to 1 mm |
Vertical Resolution | 0.1 nm |
Maximum Scan Length | 55 mm |
Data Acquisition Rate | Up to 1000 Hz |
Software | Vision64 |
Z-Range | 1 mm |
Scan Length | 50um - 55mm |
Scan Speed | 0.01 mm/s to 10 mm/s |
Stylus Force | 1 mg to 15 mg |
Stylus Tip Radius | 2 μm |
Stage | Motorized stage |