4. Install the appropriate length RJ-11 connector to the final DMFC in the daisy chain and
connect to the “25 Pin” to “RJ-11” adapter on the RS-232/RS-485 converter supplied
with your MultiFlo Virtual Interface User Kit.
5. Connect the “25 Pin” to “9 Pin” adapter to the serial port of your personal computer or
Laptop.
6. Install MultiFlo Virtual Interface Software supplied in the Multiflo Virtual Interface User Kit.
10. OPERATION AND PERFORMANCE CHECKS
Perform the following checks after the mass flow controller has been installed into the system.
10.1 Automatic Zero Initialization
See Appendices 16.3 and Appendices 16.7.
10.2 Proper Sequencing
Systems using a microprocessor or computer for operating the MFC should sequence the
valve off between processes.
This is accomplished in the following way:
- MFC’s with Automatic Shut-off
- Simply provide a zero setpoint.
- Gas will automatically be shut off.
- MFC’s without Automatic Shut-off
- Switch Pin J off (if applicable).
Valves, whether upstream or downstream from the mass flow controller, should be
programmed to:
- turn on prior to turning on the MFC, and
- turn off after the MFC is turned off.
For units with Auto Zero, it is recommended that the upstream valve and downstream valve
be turned off for a minimum of three minutes prior to the start of a process. This is because
the Auto Zero function employs a 2 minute time delay before it begins to act upon any zero
offset.
10.3 Leak Test
It is impor
tant to test the mass flow controller connections for leak integrity, after it has been
installed into your system, with a helium leak detector.
10.4 Purge
There are two recommended purging processes, one for non-reactive gases and one for
r
eactive gases.
8
©2005 Celerity
, Inc.
#199-001-0006 REV
.F 4/05
Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com
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