10.4.1 Non-Reactive Gases:
From process tool control system fully open the MFC by setting the setpoint to 100% of
the full scale range. Purge the mass flow controller with clean, dry nitrogen or argon for a
minimum of two hours.
10.4.2 Reactive Gases:
Use one of the following three methods:
(See “Connecting to Gas Supply Line” Section 7.5)
- Cycle purge:
- Alternately evacuate and purge the mass flow controller for 2 to 4 hours with clean, dry
nitrogen or argon.
-For toxic and corrosive gases it is recommended to use 100 - 120 cycles.
- Continuous purge:
- Purge the mass flow controller with clean, dry nitrogen or argon for 8 to 24 hours.
- Evacuation purge:
- Evacuate the mass flow controller for 8 to 24 hours.
10.5 Zero Check
Reference Appendice 16.2
Note: For remote readouts, including analog-to-digital converters, ensure that the
readouts match the inputs to the controller. Adjust their zero and full-scale to match.
For more information on setting the MFC/MFM Zero, please refer to Appendice 16.2.
9
©2005 Celerity
, Inc.
#199-001-0006 REV
.F 4/05
Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com
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