1
1. OVERVIEW
Celerity Mass Flow Controllers precisely monitor and control the mass flow of gases in processes
such as Plasma Etching, CVD, Diffusion, EPI, and Sputtering where superior accuracy is required.
Mass Flow Meters ar
e identical to mass flow controllers, except that they do not have a controlling
valve. Therefore they do not control, but only accurately measure and report the gas flow that is
passing through them.
1.1 Flow Controller / Flow Meter Model Designations
Unit Mass Flow Controller models have the prefix of “UFC-“ (Unit Flow Controller), and Mass
Flow Meters have the prefix of “UFM-” (Unit Flow Meter).
Mass Flow Controllers: UFC-XXXX (Unit Flow Controller)
Mass Flow Meters: UFM-XXXX (Unit Flow Meter)
1.2 Flow Controller / Flow Meter Model Designations, by Applications
Table 1 shows the general applicability of each model covered by this manual.
Table 1. Model Designations by applications
Elastomer Seal Products - 32 µ in Ra Finish
122 series Control Valves 1.1" 10 sccm - 30 slm 122
180 series Standard Flow Applications 1" 10 sccm - 30 slm 180HS /180HA
7300 series Standard Flow Applications 1.5" 10 sccm - 30 slm 7301 7304 7300
7320 series Standard Flow w/ Auto Shutoff 1.5" 10 sccm - 30 slm 7321 7324 7320
8100 series Standard Flow Applications 1.5" 10 sccm - 30 slm 8101 8105 8100
8130 series Setpoint Pressure Control 1.5" 10 sccm - 30 slm 8130
High Purity Metal Seal Products - 10 or 16 µ in Ra Finish
132 series Control Valves 1.42" 10 sccm - 30 slm 132
1551 series Standard Flow Applications 1.5" 30 sccm - 6 slm 1551
1630 series Setpoint Pressure Control 1.5" 10 sccm - 30 slm 1630
1660 series Standard Flow Applications 1.5" 10 sccm - 30 slm 1661 1665 1660
1660 SDS series Safe Delivery Source 1.5" 10 sccm - 30 slm 1663 1664 1662/1662L
3160 series High Flow Applications 1.5" 30 slm - 100 slm 3161 3165
5360 series High Flow Applications 1.5" 30 slm - 100 slm 5361 5365
7360 series Standard Flow Applications 1.5" 10 sccm - 30 slm 7361 7364 7360
9660 series High Temperature Applications 1.5" 10 sccm - 30 slm 9660
Ultra High Purity Metal Seal Products - 4 µ in Ra Finish
8160 series Standard Flow Applications 1.5" 10 sccm - 30 slm 8161 8165 8160
8160 SDS series Safe Delivery Source 1.5" 10 sccm - 30 slm 8163 8164 8162/8162L
8260 series Standard Flow Applications 1.5" mini 10 sccm - 30 slm 8261 8260
8560 series Standard Flow Applications 1.125" 10 sccm - 30 slm 8561 8565
8560 SDS series Safe Delivery Source 1.125" 10 sccm - 30 slm 8563 8564
9500 series High Temperature Applications 1.125" 10 sccm - 30 slm 9561 9565
9860 series High Temperature Applications 1.5" 10 sccm - 30 slm 9861 9865
Footprint
F
ull Scale
Flow Range
(Min - Max)
<
Digital>
RS485
Analog
<
Digital>
DeviceNet™
PROFIBUS
<
Analog>
Analog
Protocol
Category / Model Family
©2005 Celerity
, Inc.
#199-001-0006 REV
.F 4/05
Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com
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