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UNIT 122 Series
Celerity UNIT 122 Series User Manual
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Analog and Digital
Mass Flow Controllers and Meters
User’
s Manual
©2005 Celerity
, Inc.
#199-001-0006 REV
.F 4/05
Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com
1
3
Table of Contents
Default Chapter
3
Table of Contents
3
1 Overview
6
Flow Controller / Flow Meter Model Designations
6
Flow Controller / Flow Meter Model Designations, by Applications
6
2 Standard Features
7
Attitude
7
Calibration Conditions
7
Standard Temperature and Pressure
7
Calibration Traceability
7
Manufacturing Environment
7
Purge Capability
7
3 Optional Features
7
Auto Shut-Off Option
7
Response Time Options
7
Connector Options
8
Special Adapters
8
Valve Options
8
Flow Direction Options
8
Auto-Zero Option
8
Fittings Options
9
4 Power Supplies
9
5 Product Drawings
9
6 Product Specifications
9
MFC Side Can Label
9
Traceability
10
7 Installation
10
Unpacking
10
Purging before Installing the MFC
10
Positioning the Controller
10
Mounting the Controller
11
Connecting to Gas Supply Line
11
8 Electrical Connections
11
Voltage and Pinouts
11
Connections to a Power Supply
12
Warm up
12
9 Multiflo Virtual Interface
12
Features
12
Configure the DMFC for Networking
12
10 Operation and Performance Checks
13
Automatic Zero Initialization
13
Proper Sequencing
13
Leak Test
13
Purge
13
Non-Reactive Gases
14
Reactive Gases
14
Zero Check
14
Full Flow Check
15
Flow Control Response Check
15
Calibration Check
15
11 Troubleshooting
16
Environmental Factors
16
MFC Troubleshooting Checklist
16
12 Removal
17
Purging before Removing the MFC
17
Removing the MFC
17
Packaging the MFC
17
Un-Packaging
17
Cleaning
17
Shipping
17
Shipping Costs
18
Returned Material Authorizations (RMA)
18
Documentation
18
13 Maintenance
18
Emergency Service
18
Routine Maintenance
18
Factory Calibration and Service
18
Field Service
18
Technical Support
19
14 Warranty
19
15 Web Site Technical Resources
19
16 Appendices
20
Connector Pinouts
20
Setting the MFC/MFM Zero
23
9000 Series Supplement
25
Troubleshooting Guide
29
Devicenet Operations Leds
31
Manufacturing, Sales, and Service Locations
32
Auto-Zero Feature (for Analog Mass Flow Controllers)
33
4
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Celerity UNIT 122 Series Specifications
General
Brand
Celerity
Model
UNIT 122 Series
Category
Measuring Instruments
Language
English
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