Operation
4-2 P/N 8040375G001
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HELIX TECHNOLOGY CORPORATION
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Roughing Maps
For multi-pump systems that share a roughing pump through a roughing
manifold, it is necessary to map the Cryopumps as shown in Figure 4-2. A
roughing map keeps track of which pumps are on which roughing
manifold. All Cryopumps that are connected to a single roughing manifold
are in the same map. If your system has more than one roughing manifold,
then you can have more than one roughing map. It is possible to have up to
five roughing maps in a multi-pump On-Board System. When the
Cryopumps are properly mapped, the Network Terminal will coordinate
the use of the roughing valves for both Full and FastRegen.
Figure 4-2: Rough Valve Map Example
<
<
<
<
<
<
X
X
X
Group A
Pump 00
Pump 01
Pump 02
<
<
<
<
<
<
X
X
X
Group B
Pump 05
Pump 08
Pump 06
<
<
<
<
<
<
X
X
X
Pump 03 Pump 04
Pump 07
<
<
X
Pump 09
Group C
Roughing Pump 1
Roughing Pump 2
Roughing Pump 3
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