Dreve PCU LED - Monitoring

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PCU LED
38
10. Monitoring
Explanation of the parametric representation in the final screen in the user level
Presentation Meaning
216
Sequence number (number of exposure jobs)
01/01/2000 Date
01:17:35 Time
040 LED – intensity of the upper panel in %
040 LED – intensity of the lower panel in %
0800 Exposure time [place 1 and 2: minutes; place 3 and 4: seconds]
1 Vacuum ON [1 – ON; 0 – OFF]
0 Nitrogen OFF [1 – ON; 0 – OFF]
Breakdown of the error codes in the final screen in the user level
Code Status
Background display
00 Accurate work flow Green
01
Pump runs during the exposure process Green
02 Pump cannot draw any vacuum Red
03 LED do not function Red
The different process parameters are recorded by means of the sensors used in the
PCU LED. These are shown in the final screen in the user level.