EBARA A10S - Page 28

(14)
[50Hz]
1
10
100
1000
10000
100000
10
-2
10
-1
10
0
10
1
10
2
10
3
10
4
10
5
[Pa]
[l/min]
A07V
[60Hz]
1
10
100
1000
10000
100000
10
-2
10
-1
10
0
10
1
10
2
10
3
10
4
10
5
[Pa]
[l/min]
A07V
Figure 3.3 Performance Curve (A07V)
EBARA Corporation