© Edwards Limited 2008. All rights reserved. Page 1
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Introduction
A386-11-880 Issue E
1Introduction
1.1 Scope and definitions
This manual provides installation, operation and maintenance instructions for the Edwards CDP and QDP/iQDP
Exhaust-Silencers. You must use the Exhaust-Silencer as specified in this manual.
Read this manual before you install the Exhaust-Silencer. Important safety information is highlighted as WARNING
and CAUTION instructions; you must obey these instructions. The use of WARNINGS and CAUTIONS is defined below.
Cautions are given where failure to observe the instruction could result in damage to the equipment, associated
equipment and process
The units used throughout this manual conform to the SI international system of units of measurement.
1.2 Description
Two models of Exhaust-Silencer are available, one model for use with the Edwards CDP range of pumps and one model
for use with the Edwards QDP and iQDP ranges of pumps. The two models are identical, except that the Exhaust-
Silencer for the CDP pumps has mounting hooks (Figure 1, item 14).
The Exhaust-Silencer attenuates the pulses in the exhaust pressure from the pump and reduces pump-induced
resonance in your exhaust-extraction system.
The Exhaust-Silencer is suitable for use with all of the corrosive and particulate gases typically used in semiconductor
applications and is designed for ease of maintenance.
1.3 Construction
Refer to Figure 1 in the following description.
The body of the Exhaust-Silencer (5) has a two-stage expansion chamber (6, 9) which is separated by a baffle-plate
(8) at one end of the body. Both ends of the body of the Exhaust-Silencer have an end-cover plate (3, 12) which is
retained by cap-head bolts (1) and sealed by a fluoroelastomer ‘O’ ring (4, 10).
Inlet and outlet connections (15, 13) to the Exhaust-Silencer are standard NW40 flanges.
1.4 Principle of operation
Exhaust gases from the pump-outlet enter the Exhaust-Silencer through the inlet (15) and pass into the first-stage
expansion chamber (9). The gases then pass through the transfer tube (7) into the second-stage expansion chamber
(6) and then pass through the outlet tube (16) to the outlet of the Exhaust-Silencer (13).
The internal transfer and outlet tubes (6, 16) provide a long attenuation path for the exhaust gases.
Materials which sublime from the pump exhaust gases will collect in the expansion chambers of the Exhaust-Silencer.
These materials must be removed regularly from the Exhaust-Silencer to maintain its efficiency (refer to Section 4).
Warnings are given where failure to observe the instruction could result in injury or death to
people.
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