Edwards EXC 100E

© Edwards Limited 2015. All rights reserved. Page iii
Edwards and the Edwards logo are trademarks of Edwards Limited.
Contents
D396-20-880 Issue H
Tables
Table Page
1 Operating and storage conditions ..................................................................................... 9
2 Mechanical data .......................................................................................................... 9
3 Electrical data ............................................................................................................ 9
4 EXT pump electrical output data .....................................................................................10
5 Logic interface data ....................................................................................................10
6 Factory settings .........................................................................................................11
7 Electrical connectors ...................................................................................................11
8 Configuration links ......................................................................................................13
9 Selection of vent-valve control options .............................................................................14
10 Logic interface pins ....................................................................................................16
11 Electrical supply cable wires ..........................................................................................18
12 APG to logic interface connections ..................................................................................19
Associated publications
Publication title Publication number
EXT Pump Accessories B580-66-880
EXT70 and EXT250 Turbomolecular Pumps B722-01-880
EXT351 and EXT501 Turbomolecular Pumps B727-20-880