B756-01-880 Issue K
Page ii © Edwards Limited 2013. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Contents
7.3 Spares ..................................................................................................................... 29
7.3.1 ISX inlet screens .........................................................................................................29
7.3.2 Inlet strainer (interstage pumps only) ...............................................................................30
7.3.3 Inlet flange seals ........................................................................................................30
7.4 Accessories ...............................................................................................................30
7.4.1 Installation ...............................................................................................................30
7.4.2 EXDC drive modules ....................................................................................................30
7.4.3 EXC controllers .......................................................................................................... 30
7.4.4 Pump-to-controller cables .............................................................................................31
7.4.5 EXT water cooling block assembly ...................................................................................31
7.4.6 TAV vent valve and vent port adaptor ...............................................................................31
7.4.7 ACX air cooler ...........................................................................................................31
7.4.8 VRX vent restrictor .....................................................................................................32
For return of equipment, complete the HS Forms at the end of this manual.
Illustrations
Figure Page
1 Dimensions of the EXT 200/200H split flow pump system (units in mm) ....................................... 9
2 Dimensions of the EXT 200/200H GCMS split flow pump system (units in mm) ............................... 10
3 Dimensions of the EXT 200/200H ICPMS split flow pump system (units in mm) ...............................11
4 Dimensions of the EXT 200/200H GCMS/LCMS (reversed body) ................................................. 12
5 A typical vacuum system using a turbomolecular pump ..........................................................14
6 Correct installation of inlet screen ..................................................................................16
7 Mounting attitude range of an EXT split flow pump ...............................................................17
8 Installation of optional accessories ..................................................................................32
Tables
Table Page
1 General .................................................................................................................... 3
2 Vent gas and vent control data ........................................................................................ 4
3 Water cooling ............................................................................................................. 5
4 Technical data ........................................................................................................... 6
5 List of items supplied ..................................................................................................15
6 Vent restrictor orifice diameter (with atmospheric pressure at the inlet of the vent valve) ..............18
7 Fault finding .............................................................................................................25
8 ISX inlet screens .........................................................................................................29
9 Inlet strainer (interstage pumps only) ...............................................................................30
10 Inlet-flange seals ........................................................................................................30
11 EXDC drive modules ....................................................................................................30
12 EXC controllers ..........................................................................................................30
13 Pump-to-controller cable ..............................................................................................31
14 EXT water cooling block assembly ...................................................................................31
15 TAV vent valve and vent port adaptor ...............................................................................31
16 ACX air cooler ...........................................................................................................31
17 VRX vent restrictor .....................................................................................................32
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