A590-00-880 Issue D
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Installation
3.11 Connect the cooling-water hoses
Notes: 1. For optimum water-cooling, ensure that your cooling-water supply complies with the data given in
Table 1 and that they are connected in parallel. Refer to Figure 3, items 3 and 6. Edwards would
recommend that quick connectors be used to reduce the risk of water spillage during connection/
disconnection.
2. For minimum water consumption, regulate the cooling-water flow to the iH system.
Connect the cooling-water supply as follows:
1. Use 3/8 inch BSP male pipe fittings (which you must supply) to fit the female quick-release connector to the
cooling-water supply hose and to fit the male quick-release connector to the cooling-water return hose.
2. Remove the dust-caps from the cooling-water inlet and outlet.
3. Connect your water return hose to the cooling-water outlet (Figure 3, item 6) and connect your water supply
hose to the cooling-water inlet (Figure 3, item 3).
4. Turn on the cooling-water supply.
5. Inspect the water hoses, pipelines and connections and check that there are no leaks.
Turn off the water supply while you complete the remainder of the installation procedures.
3.12 Accessories
Refer to the individual accessories manuals for installation, information, refer to Section 7.3.
The disconnect box when fitted, is used to energize and isolate the power supply to the system. It also allows the
isolation of the electrical supply during an emergency, and for maintenance and trouble shooting the system, thereby
satisfying SEMI S2 requirements. The photohelic switch/gauge when fitted, allows monitoring for loss of extraction
from the enclosure, thereby satisfying SEMI S2 requirements.Refer to the individual accessories manuals for
information about installation.