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Installation
A591-40-880 Issue A
Do not allow air to enter the equipment
Ensure that the system is leak tight
Ensure that gases in the pump do not enter the flammable range. This may be achieved by diluting gases in
the pump by supplying sufficient inert gas purge. For example, dilution with nitrogen to below one quarter
LEL (lower explosive limit) or, if that is not practical, to below 60 % LOC (limiting oxidant concentration).
The gas module supplied with the pump is not intended to perform a safety function. Users may need to
consider adding appropriate measures to monitor the flow of purge gas, for example external sensors.
Systems that are fitted with the loadlock gas module must not be used on applications pumping flammable or
pyrophoric materials.
For further information please refer to Semiconductor Pumping Application Guide (Publication no. P411-00-090) or
contact Edwards.
3.6.2 Gas purges
Gas purge is provided for the sole purpose of enabling the pumping of inert light gases such as helium.
3.7 Connect the electrical supply to the dry pumping system
The iXL120 pumps are not suitable for use with hazardous production materials. Any hazardous
production materials must be diluted to a safe level before entering the pump.
Ensure that the electrical installation of the pumping system conforms with your local and national
safety requirements. It must be connected to a suitably fused and protected electrical supply and
a suitable Earth (ground) point.
This equipment is suitable for Installation Category II as defined in IEC 60664-1. The dry pumping
system must be connected to an isolator that disconnects all current carrying conductors and can
be locked in the off position. The isolator must be in close proximity to the equipment, within easy
reach of the operator and identified as the disconnect device for the equipment.
The equipment must be permanently Earthed. A second protective Earth (ground) conductor, with
a cross-sectional area at least equal to the phase conductor size, must be connected to the
protective Earth (ground) stud.
Ensure that the system and your electrical supply cable are suitably protected against Earth
(ground) faults and that the Earth (ground) conductor of the electrical supply cable is longer than
the phase conductors in the connector.
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