A591-40-880 Issue A
Page 26 © Edwards Limited 2012. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Operation
4.6 Emergency stop (EMS)
The iXL120 is not fitted with an Emergency Stop Button. If an emergency stop function is required, then this
product can be connected into your own Emergency Stop Control Circuit or an EMS button accessory can be
fitted (see Section 7.3).
To shut down the iXL120 system in an emergency, you can operate the emergency stop controls in your own control
system if you have connected your emergency stop circuit to the iXL120 system as described in Section 3.7.1.
When emergency stop is selected:
The pump is stopped.
The thermal management system, (water supply control valve), remains active until the pump system
control temperature decreases to a defined level.
The Pump Display Terminal will display ‘STOP ACTIVATED’ (If connected).
The Running LED will go off (refer to Figure 3, item 1).
The Alarm LED illuminates (refer to Figure 3, item 6).
4.7 Restart the pump after an emergency stop or automatic shut-
down
If the iXL120 system has been automatically shut down because of an alarm condition, the alarm condition must be
rectified before you can restart the iXL120 system. If a PDT is being used then record any alarm codes generated
before restarting the pump (refer to Appendix A2). Restart the iXL120 system as described in Section 4.1.
4.8 Auto Tune
Variation in foreline length and architecture combined with differences from pump to pump can lead to variations in
vacuum performance. Auto Tune compensates for these variations to give a consistent vacuum performance. The
Auto Tune process adjusts the pump running speed so that a specified foreline pressure is achieved for a given flow
of gas.
4.8.1 Auto Tune requirements
The user must ensure that:
An active pressure gauge is installed at the chamber and is configured as the Auto Tune source and that
A constant flow of gas is maintained for the duration of the Auto Tune process.
The user determines the chamber pressure that is to be achieved.
4.8.2 Accessing Auto Tune
Auto Tune is initiated by the PDT. From the Setup menu on the PDT, use the up and down arrows to scroll to Auto
Tune - press ENTER.
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