Edwards iXM1200 Xcede customer special A

Figure 3 Applicaons
2.3 Advanced control and monitoring
EdCen
tra is a scalable, networked sub-fab equipment eet monitoring and data
acquision tool. EdCentra's comprehensive data capture lets the user improve
operaonal eciencies, through the:
▪ instantaneous monitoring of the equipment
▪ diagnoscs funcons such as historical trend analysis
▪ reporng on aggr
egated data
For advanced applicaons, we have a tool that allows the pumping system conguraon
to be changed.
For some applicaons it can be necessary to adjust the system operang temperatures
to align with process demands. Contact your supplier to discuss the requirements and
refer to System operang temperature conguraon on page 65 for instrucons on
conguraon.
Contact us for more informaon.
2.4 Green Mode
The Green Mode funcon decreases ulity consumpon of the system while on standby.
The Green Mode funconality is controlled with a PDT accessory or the tool through a
MicroTIM accessory. Refer to Accessories on page 93. Contact us for advice on
applicaon and acvaon of the available accessories.
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Page 12M56635880_D
M56635880_D - General descripon