Edwards iXM1200 Xcede customer special A

CAUTION: INSTALLATION SAFETY
Risk of injury
. The system power must be switched o when the MicroTIM or acve
accessories module is installed or removed. If it is not, these modules can be
damaged. Refer to the accessory manual for more informaon.
Refer to the individual accessories manuals for informaon about installaon.
The disconnect box (when installed), which agrees with the SEMI S2 requirements and is
used:
▪ to energise and isolate the power to the system
▪ to isolate the electrical supply during an emergency
▪ for maintenance
▪ for troubleshoong the system
The photohelic switch/gauge, when installed, monitors the loss of extracon from the
enclosure, which agrees with SEMI S2 requirements.
4.7 Install addional safety equipment
WARNING: HAZARDOUS GASES
Risk of injury
. If the process tool or control system needs to know the total ow rate
of nitrogen to the dry pumping system for safety reasons, install applicable
measurement equipment in the nitrogen supply pipeline.
WARNING: NITROGEN PURGE
Risk of injury
. If you use the nitrogen purges to dilute dangerous gases to a safe level,
make sure that the system shuts down if the nitrogen supply to the system fails.
If the sensors or microprocessors fail, the total ow rate of nitrogen displayed or output
by the system can be incorrect. If it is necessary to know the total ow rate of nitrogen
to the dry pump for safety reasons, install applicable measurement equipment in the
nitrogen supply pipeline. If a rotameter is installed, make sure that it is applicable for use
with nitrogen and that it is correctly calibrated.
If the nitrogen supply to the system fails, a warning message is shown on the Pump
Display Terminal (PDT) (if installed) and sent to any interface system connected to the
system. Make sure that the installaon is congured so that it remains safe if there is a
failure of the nitrogen supply to the system.
If an alarm condion occurs (and the system is not congured to ‘Run 'l crash’, refer to
Alarm condions on page 79) the system will shut down automacally. Make sure that
the installaon remains safe if the system shuts down automacally.
10/2020 - ©Edwards Limited
Page 48M56635880_D
M56635880_D - Inst
allaon