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Edwards SCU-350HA User Manual

Edwards SCU-350HA
103 pages
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Instruction Manual (C)
MT-21E-201-E
Description Voltage
SCU-350 Series Control Unit 100 - 240 Va.c.
SCU-350 Series Control Unit
STP pump consists of the three-volumed Instruction Manuals.
Instruction Manual (A): STP pump generic Instruction Manual
Instruction Manual (B): STP pump specific information
Instruction Manual (C):
(This Instruction Manual)
STP control unit Instruction Manual
Supplied with STP control unit
Copyright 2016 Edwards Japan Limited. All rights reserved. Printed in Japan.

Table of Contents

Questions and Answers:

Edwards SCU-350HA Specifications

General IconGeneral
BrandEdwards
ModelSCU-350HA
CategoryControl Unit
LanguageEnglish

Summary

Declaration of Conformity

Standards and Directives Compliance

Lists EU directives and harmonized standards the SCU-350 conforms to.

Technical Compliance and Standards

EU Directives and Harmonized Standards

Lists EU directives (LV, EMC, RoHS) and applied standards (EN, UL) for the SCU-350.

SCU-350 Technical Specifications

SCU-350 Performance Details

SCU-350 User Interface

Input/Output Terminals and Safety Functions

Lists I/O terminals and the unit's integrated safety functions.

Installation: Front Panel

Installation: Rear Panel Connections

Rear Panel Components and Warnings

Identifies rear panel connectors and highlights hazardous voltage warnings.

Installation Precautions

General Warnings and Operating Environment

Provides warnings before installation and requirements for the operating environment.

Cable Connection Procedures

General Cable Connection Warnings

Highlights important safety warnings for connecting cables.

Power Cable Installation and Safety

Power Cable Warnings and Connection

Safety warnings for power cables and instructions for connection.

Integration with Semiconductor Equipment

Power Connection and EMO Circuit

Requirements for power connection and integration of the EMO circuit.

Remote Communication Setup

Communication Ports and Protocols

Pump Tuning Procedure

Tuning Purpose and Method

Explains the purpose of tuning and outlines the step-by-step tuning method.

Understanding the LCD Display

Setting the Rated Speed

Rated Speed Adjustment Procedure

Guides on setting the pump's rated speed using DSW-B and VR1 volume.

Operation: Pre-Start Procedures

Pre-Start Checks and Vacuum System

Ensures correct installation, voltage, cables, and vacuum system setup before starting.

Operation: Powering On and Self-Test

Manual Pump Operation

Starting, Stopping, and Restarting the Pump

Detailed steps for manual start, stop, and restart operations.

Remote Operation Setup

Remote Output Signal Configuration

CON4 Connector for Remote I/O

Remote Operation Settings

Starting/Stopping Pump via I/O TB2

Methods for starting and stopping the pump using I/O TB2.

Remote Start/Stop Control Methods

I/O TB2 and CON4 Control Procedures

Detailed procedures for remote start/stop control via I/O TB2 and CON4.

Powering OFF Procedure

Safe Power OFF Sequence

Describes the correct procedure for powering off the SCU-350 unit.

Serial Communication Protocol

Serial Communication Setup

Pin Assignments and Parameter Configuration

Details serial interface cable pin assignments and communication parameter settings.

Serial Communication Modes

Remote Input Mode Selection via DSW-B

Explains how DSW-B No.5 selects remote input modes (CON3 or TB2).

Serial Protocol Commands and Queries

Protocol Overview and Sending Commands

Explains the Query-Command protocol and how to send commands to SIM.

Serial Communication Queries

List and Description of Queries

Details available queries for alarm, control, pump state, and parameters.

Serial Communication Commands

Serial Communication Error Handling

Maintenance: Error and Running Time Logs

Maintenance: Power Recovery Operations

Maintenance: Troubleshooting Common Faults

Magnetic Bearing, Vibration, and Overload Issues

Troubleshooting for magnetic bearing, excessive vibration, and motor driver overload.

Maintenance: Error Message Handling

Maintenance: Error Message Troubleshooting Guide

Maintenance: Error Message Troubleshooting Guide (Cont.)

Maintenance: Troubleshooting Guide

Maintenance: Error Records Display

General Maintenance and Cleaning

Scheduled Maintenance and Overhaul

Storage, Transportation, and Disposal

Service, Spares, and Accessories