Edwards SCU-1601

MT-96E-1B1-0
Description Voltage
SCU-1601 Control Unit 200 - 240 Va.c.
SCU-1601 Control Unit
for STP-XA2703BV155 / STP-XA3203BV155
Instruction Manual (C)
STP pump consists of the three-volumed Instruction Manuals.
Instruction Manual (A):
STP pump generic Instruction Manual
Instruction Manual (B):
STP pump specific information
Instruction Manual (C):
(This Instruction Manual)
STP control unit Instruction Manual
Supplied with STP control unit
Instruction Manual (D):
STC-U e-TMS unit for Turbomolecular
Pump
Copyright 2023 Edwards Japan Limited. All rights reserved. Printed in Japan.
2022.06

Edwards SCU-1601 Specifications

General

Brand	Edwards
Model	SCU-1601
Category	Control Unit
Language	English

Summary

INTRODUCTION

Scope and Definitions

Defines the manual's scope and key terms for the SCU-1601 control unit.

Electromagnetic Compatibility

Details EMC compliance for the SCU-1601, including standards and test lists.

Limited Warranty

Outlines warranty terms, conditions, and exclusions for the product.

Labels

Describes safety and identification labels affixed to the SCU-1601 unit.

Label Affixing Positions

Shows the locations of various labels on the SCU-1601 unit.

General Description

Provides an overview of the SCU-1601 control unit's functions and purpose.

INSTALLATION

Unpacking

Instructions for checking and unpacking the STP control unit upon delivery.

Front Panel

Details the components and functions of the SCU-1601 front panel.

Rear Panel

Identifies and describes the connectors and components on the SCU-1601 rear panel.

Precautions Before Installation

Lists essential safety precautions and environmental requirements for installation.

Attaching SCU-1601 to a Rack

Provides guidance on securely mounting the SCU-1601 unit into a rack.

Cable Connection

Explains how to connect various cables to the SCU-1601 and STP pump.

Connecting to Semiconductor Equipment

Details how to connect the SCU-1601 to external semiconductor equipment.

Remote Communication

Describes methods for establishing remote communication with the SCU-1601.

Adjustment Methods

Covers procedures for tuning and calibrating the SCU-1601 and STP pump.

TECHNICAL DATA

SCU-1601 Specifications

Lists detailed technical specifications for the SCU-1601 control unit.

SERIAL COMMUNICATION PROTOCOL

Introduction

Introduces the serial interface and software for operating the STP pump via PC.

Connection and Setting Up

Details serial port connections (COM1, COM2) and PC communication setup.

Protocol Specifications

Defines the communication protocol, including frame formats and control characters.

Command Specifications

Lists and explains all available commands for controlling and querying the STP pump.

STP-Link

Introduction

Introduces the STP-Link application for pump operation and status monitoring.

EdCentra

EdCentra Overview

Introduces EdCentra, a centralized monitoring system for Edwards equipment.

MAINTENANCE

Safety Functions

Describes safety features related to power failures and operational abnormalities.

WARNING Message Function

Explains how the SCU-1601 displays warning messages for maintenance needs.

WARNING Message Description

Details specific warning messages, their causes, and corresponding damage points.

WARNING Function Setting

Covers how to enable/disable warning functions and set thresholds.

Error at Self Test State

Lists and explains error messages that occur during the SCU-1601 self-test.

When Error Message Not Displayed on LCD

Provides troubleshooting steps for issues indicated by LEDs but not LCD error messages.

Error Record Message Display Function

Explains how to view stored error records and their details.

Maintenance and Inspection

Outlines procedures for routine maintenance, cleaning, and inspection of the SCU-1601.

STORAGE, TRANSPORTATION AND DISPOSAL

Storage of the SCU-1601

Provides guidelines for storing the SCU-1601 unit when not in use.

Transporting for Repair or Overhaul

Details procedures for safely transporting the unit for service or repair.

Disposal

Instructions for disposing of the SCU-1601 unit as industrial waste.

SERVICE, SPARES AND ACCESSORIES

Introduction

Information on obtaining Edwards products, spares, and accessories.

Service

Overview of Edwards service options, including repair and exchange.

Spares

Details available spare parts and recommended replacement intervals.

Accessories

Lists purchasable accessories for the SCU-1601 and STP pump.