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Edwards SCU-1601

Edwards SCU-1601
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SCU-1601 Control Unit for Turbomolecular Pump
MT-96E-1B1-0
Page 136
8
MAINTENANCE
8.3 "WARNING" message description
8.3.1 Damage point function
Impact of the STP pump rotor onto the touch-down bearing, such as by an unexpected in-rush of air
from outside or in the event of power failure, can damage the touch-down bearings. The SCU-1601
monitors these impacts and assigns damage points to the event of "Disturbance" or "Mains Failure".
The damage point increases with the rotational speed up to 15 point for each "Disturbance", and 1
point for each touch-down at "Mains Failure", ”Inordinate Current”, ”AMB Overcurrent”, ”AMB Ctrl
Lost”, ”Aberrant Accel”, ”Aberrant Brake”.
Refer to Section 3.10, "Confirmation mode" about confirmation method of damage point.
STP pump
Warning message
First Damage Limit
Second Damage Limit
STP-XA2703BV155
STP-XA3203BV155
45 or more
60 or more
Table 34 - Accumulated damage point and warning message
8.3.2 First damage limit
"First Damage Limit" is displayed when the accumulation point attains the setting value shown in
Table 34. The rotating operation can be performed though "WARNING" message is displayed. It is
recommended to have the STP pump overhauled as soon as possible.
8.3.3 Second damage limit
"Second Damage Limit" is displayed when continuing to operate the STP pump after "First Damage
Limit" is displayed and the accumulation of the damage point attains the setting value by further
"Disturbance" and "Mains Failure".
Overhaul the STP pump because the STP pump cannot perform the rotational operation when
"Second Damage Limit" is displayed.
When operating the STP pump is needed after "Second Damage Limit" is displayed, disable the
"Second Damage Limit". The rotating operation can be performed even though the "WARNING"
message is displayed. Refer to Section 3.11 for the setting method.
8.3.4 Imbalance X_H, X_B, Z
Imbalance of the rotor of the STP pump of is always monitored. Either "Imbalance X_H", "Imbalance
X_B" or "Imbalance Z" is displayed when imbalance of the synchronized rotor with the rotational
speed exceeds the setting value.

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