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SCU-1601
Edwards SCU-1601 User Manual
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SCU-1601 Contro
l Unit for Turbomolecular
Pump
MT
-96E-1B1-0
Page
8
1
INTRODUC
TION
1.6.1
Cable sets
The following cable s
et (optional
accessories)
is used with the
STC-U, STP contr
ol unit and ST
P
pump:
•
Heater, Valve and
Sensor cable:
STP pump to STC-U
•
STP connection cabl
es:
STP pump to ST
P control unit
•
STC-
U
remote branch c
able:
STP co
ntrol unit to STC-U
•
Power extension ca
ble:
Su
p
ply power to ST
P control unit via
STC-U
•
Power cable:
Supply p
ower to STC-U
1
TMS sensor cable
6
STC-U remote branc
h cable
2
TMS heater cabl
e
7
STC-U remote cabl
e
3
TMS valve cab
le
8
Power extension ca
ble
4
STP connection c
able
9
Power cable
5
TMS valve
Figure 9 - Confi
guration of the STP p
ump with the TM
S
STP
control
unit
STP pump
9
2
1
STC-U
eTMS
unit
8
3
5
4
6
7
21
23
Table of Contents
Table of Contents
7
Introduction
15
Scope and Definitions
15
Electromagnetic Compatibility
16
Limited Warranty
17
Item Warranted
17
Disclaimer
17
Spare Parts
18
Labels
18
Label Affixing Positions
20
General Description
21
Cable Sets
22
Technical Data
25
SCU-1601 Specifications
25
Installation
29
Unpacking
29
Front Panel
29
Rear Panel
32
Precautions before Installation
33
Operating Environment
33
Insulation Test
33
Installation Area
34
Attaching the SCU-1601 to a Rack
35
Cable Connection
36
STP Connection Cable
37
STC-U Remote Branch Cable
38
STC-U Remote Cable
39
Power Extension Cable
40
Power Cable
41
Connecting to Semiconductor Equipment
44
Connecting to Power
44
Emergency off Circuit (EMO Circuit)
44
Remote Communication
45
Parallel Communication
45
Serial Communication
45
Adjustment Methods
46
Tuning
46
Tuning Method
46
Change of Data after Tuning
49
Confirmation Mode
50
Confirmation Method
50
Parameter Set Mode
53
Remote Operation Setting
53
Rotational Speed Setting
53
TMS Function Setting
53
Rotational Inhibit Signal Setting
53
Second Speed Option Setting
53
Second Speed Setting
53
Optional Output Signal Setting (Emergency Vent Valve Setting)
54
Second Damage Limit Setting
54
Warning Function Setting
55
3.11.10 Serial Port COM1 Setting
56
3.11.11 Serial Port COM2 Setting
56
3.11.12 Date/Time Setting
56
3.11.13 Edcentra Setting
56
3.11.14 Factory Setting
56
3.11.15 Parameter Setting Procedure
57
Manual Operation Mode
64
Operation
67
Before Starting the STP Pump
67
Confirmation before Starting
67
Confirmation of Vacuum System
67
Powering on
68
Self Test
68
CAUTION" Message in the Self Test State
68
How to Start/Stop the STP Pump
69
Manual Start/Stop the STP Pump
69
Starting the STP Pump
69
Stopping the STP Pump
69
Starting the STP Pump after Stopping
70
Remote Operation
72
Input Signal Pins
72
Output Signal Pins
76
Remote Setting
80
Starting/Stopping the STP Pump
80
Rotation INHIBIT Signal
81
Second Speed Option
82
Starting the STP Pump after Stopping
84
Starting the STP Pump after a Safety Function Operates
84
Powering off
84
Operating the TMS Unit (for Use with the TMS Unit)
85
Before Starting
85
Starting/Stopping
85
Setting the TMS Unit Function
85
Temperature Control
85
Serial Communication Protocol
87
Introduction
87
Connection and Setting up
88
Signal Connection
88
Connecting the RS485
90
Communication Parameter Setting
92
Recommended Items about Communication Cable Installation
93
Protocol Specifications
96
General Description
96
Standard Transmission Frame (in the RS232/RS485 Single Point Connection)
97
Control Command
98
(In the RS232/RS485 Single Point Connection)
98
Query Command
99
(In the RS232/RS485 Single Point Connection)
99
Transmission Data Format
100
Frame Control (Checksum)
100
Error Control
101
Transmission Frame in the RS485 Multi-Point Connection
101
Control Command in the RS485 Multi-Point Connection
102
Query Command in the RS485 Multi-Point Connection
104
Broadcasting Command in the RS485 Multi-Point Connection
105
Application Note
106
Command Specifications
110
Command List
110
Readmeas
111
Command
111
Readfailmess
112
Readmodfonct
115
Readversion
117
Readcounters
118
Readsetpoint
119
Readmotortemp
119
Readstatus
120
Readevents
121
Setspeedsetpoint
122
Readspeedsetpoint
123
Readmodfonctwithwarning
124
Readmeasvalue
127
Setoptions
129
Second Speed Option Setting
130
Second Speed Selection
131
Readoptions
132
Second Speed Function Setting
133
Second Speed Select
134
External TMS Unit Setting
135
External TMS Temperature
138
Stp-Link
141
Edcentra
143
Maintenance
145
Safety Functions
145
Power Failure
145
Operation after a Power Recovery
146
Abnormal State of Magnetic Bearing
147
Excessive Vibration
147
Motor Driver Overload
147
Overheating Inside the STP Pump
147
Overheating Inside the SCU-1601
147
Overspeed
148
Abnormality/Error in the TMS Unit (for Use with the TMS Unit)
148
WARNING" Message Function
149
WARNING" Message Display Function
149
WARNING" Message Description
150
Damage Point Function
150
First Damage Limit
150
Second Damage Limit
150
Imbalance X_H, X_B, Z
150
Pump Run Time over
151
Pump Overload
151
Low RTC Battery
152
Much Motorcurrent
152
WARNING" Function Setting
153
Error at Self Test State
154
Error after Self Test
155
Error Messages
155
Troubleshooting Immediately after Power Failure Occurs
155
Troubleshooting Immediately after Other Abnormality/Errors Occur
156
When Error Message Is Not Displayed on LCD
165
Abnormalities When Powering on
165
Abnormalities When Performing Rotational Operation
165
Other Abnormalities
166
Error Record" Message Display Function
166
Maintenance and Inspection
167
Cleaning
167
Maintenance
168
Storage, Transportation and Disposal
169
Storage of the SCU-1601
169
Transporting for Repair or Overhaul
169
Disposal
170
Service, Spares and Accessories
171
Introduction
171
Service
171
Spares
171
Accessories
172
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Edwards SCU-1601 Specifications
General
Brand
Edwards
Model
SCU-1601
Category
Control Unit
Language
English
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