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Edwards SCU-1601

Edwards SCU-1601
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SCU-1601 Control Unit for Turbomolecular Pump
MT-96E-1B1-0
Page 50
3
INSTALLATION
3.12 Manual operation mode
The operation of the built-in TMS heater, the built-in TMS water valve, the emergency vent valve and
the output channel device of the External TMS unit can be inspected in manual operation mode.
However, the manual operation cannot be performed during the REMOTE operation.
1. Press the "DOWN" and "SELECT" switches simultaneously to enter Manual Mode, then "Manual
Operation TMS Heater OFF" is displayed.
2. Press "UP" switch to display "TMS Heater ON", and the TMS Heater output turns "ON".
Press "DOWN" switch to display "TMS Heater OFF", and the TMS Heater output turns "OFF".
3. Press "SELECT" switch to display "TMS Water Valve Close", and the TMS water valve can be
operated manually with "UP" and "DOWN" switches.
4. Press "SELECT" switch to display "Leak Valve Close" and the emergency vent valve can be
operated manually with "UP" and "DOWN" switches.
5. Press “SELECT” switch to display “undef_OD1 OFF”, and TMS heater and TMS water valve
added by STC-U can be operated manually with "UP" and "DOWN" switches.
6. Press “SELECT” switch to display “undef_OD2 OFF” , and TMS heater and TMS water valve
added by STC-U can be operated manually with "UP" and "DOWN" switches.
7. Press “SELECT” switch to display “undef_OD3 OFF” , and TMS heater and TMS water valve
added by STC-U can be operated manually with "UP" and "DOWN" switches.
8. Press “SELECT” switch to display “undef_OD4 OFF” , and TMS heater and TMS water valve
added by STC-U can be operated manually with "UP" and "DOWN" switches.
9. Press "SELECT" switch in the Emergency vent valve operation to return to the Operation Mode.
Note: Since using serial communication, it can happen delay to apply settings that you operated
(max. 12 sec). The status from the “UP” or “DOWN” switches are pressed to changing the
actual status of the TMS heater or valve are displayed in lower case letter as below table.
Displayed
Status
Status of Output
“on”
Received command to change a heater output “ON” status. However, an
actual status is still “OFF” yet.
“off”
Received command to change a heater output “OFF” status. However, an
actual status is still “ON” yet.
“open”
Received command to change a water cooling valve output “OPEN” status.
However, an actual status is still “CLOSE” yet.
“close”
Received command to change a water cooling valve output “CLOSE”
status. However, an actual status is still “OPEN” yet.

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