SCU-1601 Control Unit for Turbomolecular Pump
SERIAL COMMUNICATION PROTOCOL
5.4 Command specifications
5.4.1 Command list
Reads the measured rotational speed.
Sends commands START, STOP, RESET (valid
when MANUAL/REMOTE switch is selected ON.)
Reads the errors being detected.
Reads the pump operation mode and the errors
being detected.
Reads the software version of the SCU-1601.
Reads serial number, running time and start
counter.
Reads the setting values of the speed set point
and the built-in TMS temperature.
Reads the measured motor temperature.
Reads the various settings.
(Remote mode, TMS function, INHIBIT and
optional signal [emergency vent valve]).
Changes the speed set point.
*1
Reads the speed set point.
Reads the pump operation mode, the errors and
the warnings being detected
Reads the TMS temperature, motor temperature
and measured rotational speed.
Changes optional function (Second speed
option)
*1
Reads optional function (Second speed option,
External TMS temperature)
Table 22 - Command list
*1 There is an endurance limit of setting changes (no more than 24 times per day for about ten years). If this limit is exceeded,
it not only may become impossible to change the setting but can also cause pump failure. Do not make setting changes in
excess of this endurance limit.