CONTENTS
Section Title Page
1 INTRODUCTION 1
1.1 Scope and definitions 1
1.2 Electromagnetic compatibility 2
1.3 Limited warranty 3
1.3.1 Item warranted 3
1.3.2 Disclaimer 3
1.3.3 Spare parts 4
1.4 Labels 4
1.5 Label affixing positions 6
1.6 General description 7
1.6.1 Cable sets 8
2 TECHNICAL DATA 11
2.1 SCU-1601 specifications 11
3 INSTALLATION 15
3.1 Unpacking 15
3.2 Front panel 15
3.3 Rear panel 18
3.4 Precautions before installation 19
3.4.1 Operating environment 19
3.4.2 Insulation test 19
3.4.3 Installation area 20
3.5 Attaching the SCU-1601 to a rack 21
3.6 Cable connection 22
3.6.1 STP connection cable 23
3.6.2 STC-U remote branch cable 24
3.6.3 STC-U remote cable 25
3.6.4 Power extension cable 26
3.6.5 Power cable 27
3.7 Connecting to semiconductor equipment 30
3.7.1 Connecting to power 30
3.7.2 Emergency off circuit (EMO circuit) 30
3.8 Remote communication 31
3.8.1 Parallel communication 31
3.8.2 Serial communication 31
3.9 Adjustment methods 32
3.9.1 Tuning 32
3.9.2 Tuning method 32
3.9.3 Change of data after tuning 35
3.10 Confirmation mode 36
3.10.1 Confirmation method 36
3.11 Parameter set mode 39
3.11.1 Remote operation setting 39
3.11.2 Rotational speed setting 39
3.11.3 TMS function setting 39
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