Edwards SCU-1601

SCU-1601 Control Unit for Turbomolecular Pump
MT-96E-1B1-0
Page 124
5
SERIAL COMMUNICATION PROTOCOL
5.4.17.4 External TMS temperature
The temperatures of input sensors and the heater/water valve output conditions of external TMS can
be read. And also, motor temperature and measured rotational speed can be read.
Parameter
Item
Data format
Remark
1
Option function number
16-bits hexadecimal
coded ASCII
001B
hex
2
Measured temperature 1
(Unit: ºC)
8-bits hexadecimal
coded ASCII
Value shows from -32 ºC to +223 ºC
DF
hex
= +223 ºC
DE
hex
= +222 ºC
:
01
hex
= +1 ºC
00
hex
= +/-0 ºC
FF
hex
= -1 ºC
:
E1
hex
= -31 ºC
E0
hex
= -32 ºC
3
Measured temperature 2
(Unit: ºC)
8-bits hexadecimal
coded ASCII
4
Measured temperature 3
(Unit: ºC)
8-bits hexadecimal
coded ASCII
5
Measured temperature 4
(Unit: ºC)
8-bits hexadecimal
coded ASCII
6
Output device 1
condition
8-bits hexadecimal
coded ASCII
00
hex
: Heater OFF/Valve Close
Others : Heater ON/Valve Open
7
Output device 2
condition
8-bits hexadecimal
coded ASCII
8
Output device 3
condition
8-bits hexadecimal
coded ASCII
9
Output device 4
condition
8-bits hexadecimal
coded ASCII
10
Motor temperature
(Unit: ºC)
16-bits hexadecimal
coded ASCII
11
[System reservation]
8-bits hexadecimal
coded ASCII
12
Motor current
(Unit: 0.1 A)
8-bits hexadecimal
coded ASCII
13
[System reservation]
24-bits hexadecimal
coded ASCII
14
Measured rotational
speed (Unit: Hz)
16-bits hexadecimal
coded ASCII