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Edwards SCU-800 User Manual

Edwards SCU-800
141 pages
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MT-49E-101-G
SCU-800 Control Unit
Instruction Manual (C)
STP pump consists of the three-volumed Instruction Manuals.
Instruction Manual (A):
STP pump generic Instruction Manual
Instruction Manual (B):
STP pump specific information
Instruction Manual (C):
(This Instruction Manual)
STP control unit Instruction Manual
Copyright 2016 Edwards Japan Limited. All rights reserved. Printed in Japan.

Table of Contents

Questions and Answers:

Edwards SCU-800 Specifications

General IconGeneral
BrandEdwards
ModelSCU-800
CategoryControl Unit
LanguageEnglish

Summary

1 INTRODUCTION

1.1 Scope and definitions

Defines the scope and provides general definitions for the SCU-800 manual.

1.2 Applied standards

Lists the directives and standards the SCU-800 conforms to.

1.3 Limited warranty

Details the warranty terms and conditions for the SCU-800 product.

1.4 Labels

Describes the various labels affixed or printed on the SCU-800.

1.5 Label affixing positions

Shows the locations of the labels on the SCU-800 unit.

1.6 General description

Provides an overview of the SCU-800's function and its role in driving STP pumps.

2 TECHNICAL DATA

2.1 SCU-800 specifications

Presents detailed technical specifications and parameters of the SCU-800 control unit.

3 INSTALLATION

3.1 Unpacking

Instructions for checking and handling the SCU-800 upon delivery.

3.2 Front panel

Identifies and describes the components and functions of the SCU-800 front panel.

3.3 Rear panel

Details the connectors and components located on the rear panel of the SCU-800.

3.4 Precautions before installation

Provides essential safety precautions and environmental requirements for installation.

3.5 Attaching the SCU-800 to a rack

Instructions on how to securely mount the SCU-800 unit into a standard equipment rack.

3.6 Cable connection

Guidance on connecting various cables, including STP, TMS, and power cables.

3.7 Connecting to semiconductor equipment

Details on connecting the SCU-800 to semiconductor equipment for power and EMO circuits.

3.8 Remote communication

Information on parallel and serial communication for remote control of the SCU-800.

3.9 Adjustment methods

Procedures for tuning the SCU-800 for optimal performance and levitation alignment.

3.10 Confirmation mode

Describes how to check the status and information of the STP pump and SCU-800.

3.11 Parameter set mode

Guide for setting various parameters of the STP pump and SCU-800.

3.12 Manual operation mode

Explains how to inspect and operate TMS heater, valve, and fan manually.

4 OPERATION

4.1 Before starting the STP pump

Checks and confirmations required before starting the STP pump operation.

4.2 Powering ON

Steps for powering on the SCU-800 and the self-test procedure.

4.3 How to start/stop the STP pump

Describes the two methods for starting and stopping the STP pump: MANUAL and REMOTE.

4.4 Manual start/stop the STP pump

Explains how to manually start and stop the STP pump using the front panel controls.

4.5 Remote operation

Details on setting up and using remote operation via parallel and serial ports.

4.6 Rotation INHIBIT signal

Explains how to use the rotation inhibit signal for controlling pump operation.

4.7 Powering OFF

Procedure for safely powering off the SCU-800 unit.

4.8 Operating the TMS unit (for use with the TMS unit)

Instructions for operating the Temperature Management System (TMS) unit.

5 SERIAL COMMUNICATION PROTOCOL

5.1 Introduction

Introduces the serial interface and user application software for SCU-800 communication.

5.2 Connection and setting up

Details on connecting serial ports COM1, COM2, and STP-Link for communication.

5.3 Protocol specifications

Details the ASCII characters used in transmission control, error control, and handshake.

5.4 Command specifications

Lists and describes all available commands for controlling and querying the SCU-800.

6 STP-Link

6 STP-Link

Describes the STP-Link Windows application for operating and monitoring the STP pump.

7 MAINTENANCE

7.1 Safety functions

Details the safety functions related to power failure and abnormal operation of the SCU-800.

7.1.3 Abnormal state of magnetic bearing

Troubleshooting steps for abnormalities occurring in the magnetic bearing system.

7.1.4 Excessive vibration

Addresses issues related to excessive vibration and its impact on pump operation.

7.1.5 Motor driver overload

Troubleshooting for motor driver overload conditions and pump deceleration.

7.1.6 Overheating inside the STP pump

Describes causes and actions for overheating within the STP pump motor.

7.1.7 Overheating inside the SCU-800

Explains causes of SCU-800 overheating and resulting pump behavior.

7.1.8 Overspeed

Details the scenario of the pump exceeding its specified rotational speed.

7.1.9 Abnormality/Error in the TMS unit (for use with the TMS unit)

Troubleshooting for abnormalities or errors related to the TMS unit.

7.1.10 Failure of the air-cooling fan

Addresses issues related to the air-cooling fan failure in the SCU-800.

7.2 "WARNING" message function

Explains the 'WARNING' message display and its implications for pump operation.

7.3 "WARNING" message description

Provides detailed descriptions of 'WARNING' messages and damage point accumulation.

7.4 "WARNING" function setting

Details how to enable or disable various 'WARNING' functions for the STP pump.

7.5 Error at self test state

Describes error messages encountered during the SCU-800 self-test and their solutions.

7.5.2 Error messages

Lists and explains error messages displayed after the self-test state.

7.5.3 Troubleshooting immediately after power failure occurs

Provides guidance on troubleshooting after a power recovery event.

7.5.4 Troubleshooting immediately after other abnormality/errors occur

Steps for troubleshooting other abnormalities or errors after they occur.

7.6 When error message is not displayed on LCD

Troubleshooting for issues where the FAILURE LED is on but no LCD error message appears.

7.6.1 Abnormalities when powering ON

Troubleshooting steps for power-on abnormalities, such as the POWER LED not illuminating.

7.6.2 Abnormalities when performing rotational operation

Troubleshooting for issues during rotational operation, like the ACCEL LED not illuminating.

7.6.3 Other abnormalities

Covers other operational abnormalities like TMS unit not functioning or incorrect inhibit signal.

7.7 "Error Record" message display function

Explains how to view the error record, showing the last 10 detected errors.

7.8 Maintenance and inspection

General procedures for maintenance, inspection, and replacing fuses.

7.8.2 Cleaning

Instructions for cleaning the SCU-800 unit, including dust removal.

7.8.3 Maintenance

Details recommended maintenance intervals for parts like the air-cooling fan and PCBA.

8 STORAGE, TRANSPORTATION AND DISPOSAL

8.1 Storage of the SCU-800

Precautions for storing the SCU-800 over long periods to maintain its condition.

8.2 Disposal

Guidelines for disposing of the SCU-800 as industrial waste according to environmental standards.

9 SERVICE, SPARES AND ACCESSORIES

9.1 Introduction

Information on obtaining Edwards products, spares, and accessories.

9.2 Service

Details the global network of Edwards Service offices and their offerings.

9.3 Spares

Information on ordering spare parts like air-cooling fans and clock batteries.

9.4 Accessories

Lists available accessories for the SCU-800, including manuals and cables.