Edwards SCU-800

SCU-800 Control Unit for Turbomolecular Pump
MT-49E-101-G
Page 22
3
INSTALLATION
3.6.2 TMS connection cable
Connect the plug (pin) side of the TMS connection cable to the "TMS X5" of the TMS control unit.
The SCU-800 TMS unit is used with specified STP pumps. Refer to the STP pump Instruction Manual
(B) for the cable connection method.
Note: Figure 15 shows a typical TMS cable. For details of the TMS cable used with the connected
pump module, refer to the STP Pump Instruction Manual (B).
45
20
107
98
φ
3
1
φ10
61.6
103
97.5
76
85
90
4-φ4
SCU-800 side
STP pump side
1
SCU-800 connection
3
TMS heater cable connection
2
TMS valve cable connection
4
TMS sensor cable connection
Figure 15 - TMS connection cable (standard)
6
5
.
3
1
7
1
8
2
1
.
7
98
φ31
1
0
0
200 57
φ30
φ10
SCU-800 side
STP pump side
1
SCU-800 connection
3
TMS valve cable connection
2
TMS heater cable connection
Figure 16 - TMS connection cable (STP-A1603 series)
1
3
2
1
2
3
4