SCU-800 Control Unit for Turbomolecular Pump
7.8 Maintenance and inspection
WARNING
Before carrying out any maintenance or inspections on the STP pump and/or the
SCU-800, power off the primary power (turn the MAIN POWER "OFF"), confirm that
the LED and LCD are extinguished, and isolate (Lockout/Tagout) the electrical
energy source, water and gas, and other energy sources on the vacuum equipment.
Failure to do so may result in the inadvertent rotation of the STP pump which may
result in an accident, an electric shock or damage to equipment. Moreover, an
accident caused by water leaks or gas leak may occur.
WARNING
DO NOT remove the connecter while the pump is rotating. The voltage might be
output to connector according to the rotational speed, and it causes the electric
shock or the failure.
CAUTION
DO NOT touch any place other those specified when performing maintenance or inspecting the
pump and NEVER open any panel because it could cause shock, malfunction, or short circuit.
Power OFF the peripheral equipments such as a baking heater before performing maintenance and
inspections.
Only Edwards will replace the maintenance parts and will execute repair and overhaul. Contact
Service office.
7.8.1 Replacing the fuses
CAUTION
Remove the probable causes of the blown fuse (Ex. a ground fault of TMS heater, etc.) before
replacing the fuse. Always use specified and rated fuses.
Protection fuses F1 and F2 for TMS (optional accessory) are equipped to the rear panel of the STP
control unit. (F1, F2 rating: 4A, 250V, 5×20mm, Fast Acting, 217 004 Littelfuse)
Note: If fuses are blown frequently even after they are replaced, contact us.
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