SCU-800 Control Unit for Turbomolecular Pump
(3)
(21
)
(22)
(5)
(4)
(23)
(1)
(2)
(19)
(20)
(31)
(34)
+12V
+12V
+12V
+12V
+12V
+12V
2.2kΩ
2.2kΩ
2.2kΩ
2.2kΩ
2.2kΩ
2.2kΩ
+12V
START IN
STOP IN
RESET IN
INHIBIT IN
REM_IN_OPT1
REM_IN_OPT2
COM (0V)
A
B
C
D
E
F
G
Option signal input pins (unused)
Option signal input pins (unused)
Figure 29 - REMOTE X7 input signal pins
Note: 1 pin (0V) is insulated from the frame ground.
Note: The input current of remote input signal is approximately 5 mA. Make sure the minimum
applicable load of the relay contact when the remote operation with the relay.
Note: It is recommended to use a remote cable with shield type, and connect both terminals to the
ground.
4.5.2 Output signal pins
Use output signal pins according to Table 10 and Figure 30. Remote output signals function during
MANUAL and REMOTE operations. Three abbreviations are used in Table 10 and Figure 30.
N.O OUT: Normal Open Output Pin
N.C OUT: Normal Close Output Pin
COM: Common Pin