SCU-800 Control Unit for Turbomolecular Pump
7.5.4 Troubleshooting immediately after other abnormality/errors occur
WARNING
When disconnecting cables from the STP pump and/or the SCU-800 to perform
troubleshooting and take the necessary action, confirm that the STP pump has
stopped, power off the primary power (turn the MAIN POWER "OFF") and isolate
(Lockout/Tagout) the electrical energy source water and gas and other energy
sources on the vacuum equipment. Failure to do so may result in the inadvertent
rotation of the STP pump which may result in an accident, an electric shock or
damage to equipment. Moreover, an accident caused by water leaks or gas leak
may occur.
CAUTION
If the RESET operation does not extinguish the "FAILURE" LED, confirm that the STP pump has
stopped, turn OFF the primary power (Switch the MAIN POWER "OFF"), then turn ON the primary
power again (turn the MAIN POWER "ON").
Refer to Section 4.4.4.
After confirming the "BRAKE" LED has extinguished and the STP pump stops, remove the probable
cause of the abnormality. When the LCD displays an error message, take the necessary action
according to Table 34 to Table 40.
Perform the RESET operation, to turn off the "FAILURE" LED.
Perform the START operation. Check if the STP pump operates correctly.
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