SCU-800 Control Unit for Turbomolecular Pump
4.2 Powering ON
4.2.1 Self test
Refer to Figure 28.
1. Switch the MAIN POWER to "ON", located on the SCU-800 rear panel, refer to Figure 10. (To
prevent incorrect operation, a metal fitting is attached to the breaker. Loosen the screw, lift the
metal fitting and secure it.) The SCU-800 performs a self test and "Autotest" is displayed on the
LCD.
2. If no error is found, the LCD displays "Autotest complete" and the magnetic bearing is turned "ON".
When the rotor levitates normally, the LCD displays "Levitation" and the STP pump can be
operated.
4.2.2 "CAUTION" message in the self test state
When the configuration (the STP pump serial number or the SCU-800) is changed, a "CAUTION"
message is displayed on the LCD during the self test. Refer to Table 33 when "CAUTION" is other than
those in Table 8.
Connecting the same model but the different serial number of
the STP pump to the SCU-800 after the tuning is performed.
Connecting the different model of the STP pump to the
SCU-800 after the tuning is performed.
Using the different series of the STP pump with the SCU-800.
Use the specific control unit.
Table 8 - Causes of "CAUTION" at the self test state
Perform as follows when "CAUTION : Coupling is Changed" or "CAUTION : Pump Type is Changed" is
displayed.
1. When pressing the "RESET" switch, the LCD displays the model name of the STP pump currently
connected and the confirmation message to copy the data of the STP pump onto the SCU-800.
Example: "STP-A803/A1303", "DATA COPY? No"
2. When the exact model name is displayed, press the "UP" or "DOWN" switch. "DATA COPY? Yes"
is displayed on the LCD. In the case of the LCD displays an unexpected model name of the STP
pump, turn the breaker "OFF." After checking the configuration, re-start the STP pump.
3. Press the "ENTER" switch in the state of "DATA COPY? Yes" on the LCD. "Press RESET 3 sec to
Update Data" is displayed on the LCD.
4. Press the "RESET" switch 3 sec. or more. "Updating data from Pump to PCB" is displayed for a
few second, and then "Tuning" is displayed, the tuning is performed automatically.
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