SCU-800 Control Unit for Turbomolecular Pump
SERIAL COMMUNICATION
PROTOCOL
16-bits hexadecimal coded
ASCII
*1
When the parameter value is larger than the rated rotational speed, it is automatically set to the rated rotational speed.
When the parameter value is smaller than half of rated rotational speed, it is automatically set to half of rated rotational
speed. The value of "Speed Set Point" displayed in LCD of SCU-800 is in increments of 500 rpm.
Example:
: 01F4
hex
= 500 Hz = 30,000 rpm
5.4.13 ReadSpeedSetPoint
Function: Reads the "Speed Set Point" value. This value is the same as "ReadSetPoint" parameter 1
(Speed Set Point).
Transmission frame:
16-bits hexadecimal coded
ASCII
Example:
: 0320
hex
= 800 Hz = 48,000 rpm