SCU-800 Control Unit for Turbomolecular Pump
Pins for inputting the START signal. The following two methods
are available:
1) Short the circuits between (1)-(21). Then, short the circuits
between (3)-(21) for 0.3 seconds or more. However, when
inputting this START signal simultaneously with switching "ON"
the breaker on the rear panel, continue to short these pins for
10 seconds or more.
2) Short the circuits between (1)-(3). In this case, (21) is not
used.
Pins for inputting the STOP signal.
1) When 1) above is used to start the STP pump, open the
circuits between (1)-(21) to stop the STP pump.
2) When 2) above is used to start the STP pump, open the
circuits between (1)-(3) to stop the STP pump.
Pins for inputting the abnormality RESET signal.
When a safety function operates, remove the cause of the
abnormality/error after confirming the STP pump has stopped.
When the cause of the abnormality/error is removed, short the
circuits between (1)-(22) for 0.3 seconds or more to extinguish
the "FAILURE" LED.
Pins for inputting the rotation INHIBIT signal (valid in both
MANUAL and REMOTE operations).
When pins (1)-(5) are set to open, the STP pump does not
rotate even by performing the start operation. (The pump does
not rotate even by manually starting the pump) When these
pins are set to open while the pump is in rotation, the pump will
stop.
When the INHIBIT signal is release, the pump restarts.
When not using this function, set the rotation INHIBIT signal
function to the "DISABLE" (see Section 3.11, "Parameter set
mode").
(2), (19), (20), (31), (34)
CAUTION
DO NOT connect anything to these pins. Doing so may damage
the SCU-800 or the vacuum equipment.
Table 9 - REMOTE X7 input signal pins
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