SCU-800 Control Unit for Turbomolecular Pump
7.1.4 Excessive vibration
When serious vibration or mechanical shock causes the rotor to come in contact with the touch down
bearing (due to external vibration/impact, intrusion of atmosphere or foreign matter into the STP pump
or rotor imbalance), the STP pump decelerates and stops.
The "FAILURE" LED illuminates and the LCD displays error message "Disturbance *".
7.1.5 Motor driver overload
When the STP pump does not attain the rated speed within approximately 30 minutes after starting or
when the ACCELERATION state remains unchanged during operation for approximately 30 minutes,
the STP pump decelerates and stops.
The "FAILURE" LED illuminates and the LCD displays error message "Driver Overload".
7.1.6 Overheating inside the STP pump
When the motor inside the STP pump overheats due to an abnormal high temperature or overload
operation, the STP pump decelerates and stops.
The "FAILURE" LED illuminates and the LCD displays error message "Motor Overheat".
7.1.7 Overheating inside the SCU-800
The temperature in the SCU-800 increases when the ventilating duct is blocked or the ambient
temperature is high. The LCD displays error message "CAUTION : CNT heat*" when the inside of the
SCU-800 overheats. In this case, the pump does not stop.
When the SCU-800 overheats continuously, the STP pump decelerates and stops.
The "FAILURE" LED illuminates and the LCD displays error message "CNT Overheat *".
7.1.8 Overspeed
When the rotational speed of the STP pump exceeds the specified rotational value due to a failure in
the motor driver, the MAIN POWER on the SCU-800 switches "OFF". The STP pump has no power
supplied, decelerates and stops.
The "FAILURE" LED illuminates and the LCD displays error message "Overspeed *".
To Next Page
Loading...
