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Edwards SCU-350 Series User Manual

Edwards SCU-350 Series
103 pages
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Instruction Manual (C)
MT-21E-201-E
Description Voltage
SCU-350 Series Control Unit 100 - 240 Va.c.
SCU-350 Series Control Unit
STP pump consists of the three-volumed Instruction Manuals.
Instruction Manual (A): STP pump generic Instruction Manual
Instruction Manual (B): STP pump specific information
Instruction Manual (C):
(This Instruction Manual)
STP control unit Instruction Manual
Supplied with STP control unit
Copyright 2016 Edwards Japan Limited. All rights reserved. Printed in Japan.

Table of Contents

Questions and Answers:

Edwards SCU-350 Series Specifications

General IconGeneral
BrandEdwards
ModelSCU-350 Series
CategoryControl Unit
LanguageEnglish

Summary

Declaration of Conformity

Product Conformity Standards

Lists conformity to EU directives and applied standards (EMC, safety, RoHS).

Manufacturer and Representative Information

Provides details of the manufacturer and the authorized EU representative.

Introduction

Scope, Standards, and Warranty

Defines scope, lists standards, and details warranty terms and disclaimers.

Labels and Identification

Details safety labels, their positions, and general unit identification.

General Description and Cable Sets

Provides a general overview of the control unit and describes the available cable sets.

Technical Data

Unit Specifications

Details specifications for the SCU-350 and related control unit models.

External Appearance and Dimensions

Provides visual information and dimensions of the SCU-350 unit.

Installation

Preparation and Panel Overview

Covers unpacking, and identifies components on the front, rear, top, and side panels.

Installation Environment and Mounting

Details precautions, operating environment, installation area, and rack mounting procedures.

Cable Connections and Power

Explains how to connect STP, power, and communication cables.

System Integration and Communication

Guides on connecting to semiconductor equipment and setting up remote communication.

Tuning and Configuration

Explains the tuning process, LCD display states, and setting the rated speed.

Operation

Pre-Operation Procedures

Covers checks before starting, vacuum system confirmation, powering on, and self-test procedures.

Manual Pump Operation

Details procedures for manually starting, stopping, and restarting the STP pump.

Remote Operation Setup and Configuration

Explains remote operation modes, terminal blocks (I/O TB1, TB2, CON4), and cable connections.

Remote Pump Control and Safety Operations

Covers remote start/stop, reset operations via I/O TB2 and CON4, and safety function restarts.

Powering Off the Unit

Outlines the correct procedure for safely powering down the SCU-350 unit.

Serial Communication Protocol

Setup and Hardware

Covers introduction, hardware setup, pin assignments, serial settings, and communication modes.

Cable Installation and Grounding

Provides recommendations for communication cable installation, including grounding methods and noise reduction.

Protocol Overview and Commands

Explains the serial protocol, how to send commands/queries, and the expected replies and syntax.

Error Messages and Data Formats

Details queries, error messages, pump states, alarm types, and parameter data formats for communication.

Maintenance

Safety Functions and Power Failure Handling

Covers safety functions, power failure response, and operation after recovery.

Common Issues and Error Diagnosis

Details common abnormalities like vibration, overload, overheating, overspeed, and error messages.

Troubleshooting and Error Display

Guides on troubleshooting without LCD messages, specific errors, and displaying past errors.

Cleaning and Scheduled Maintenance

Outlines cleaning procedures and recommended maintenance intervals for key components.

Storage, Transportation, and Disposal

Storage Guidelines

Provides instructions for storing the SCU-350 unit when not in use for extended periods.

Transportation and Repair Procedures

Details procedures for safely transporting the unit for repair or overhaul, including contact information.

Disposal Instructions

Outlines the proper methods for disposing of the SCU-350 unit as industrial waste.

Service, Spares, and Accessories

Service and Support Options

Describes the available service options, including exchange, repair, and on-site support.

Spare Parts and Accessories

Lists available spare parts like cooling fans and accessories such as manuals and cables.