Edwards SCU-350 Series

SCU-350 Series Control Unit for Turbomolecular Pump
MT-21E-201-E
Page 72
5
SERIAL COMMUNICATION PROTOCOL
5.5.3 Alarm type
Alarm code Alarm type
0 No Error
3 RAM Error
4 Disturbance
5 Power failure
6 Overspeed
7 Overload
8 Controller OT
9 Pump Overtemp
10 Thermal Error
11 Driver RA
12 Drier OC
13 Driver OV
14 Driver UV
15 Driver HF
17 Tuning Error 1
18 Tuning Error 2
19 Tuning Error 3
20 Tuning Error 4
21 Tuning Error 5
22 Test Error
24 Cable Disconnect
25 Driver Error 1
26 Driver Error 2
27 Driver Error 3
28 Driver Error 4
29 Driver Error 5
30 Driver Error 6