Edwards SCU-350 Series

SCU-350 Series Control Unit for Turbomolecular Pump
MT-21E-201-E
Page 7
1
INTRODUCTION
1.6 General description
The SCU-350 is the control unit required to drive the STP series of turbomolecular pumps. The
SCU-350 converts the single-phase line supply voltage into a 3-phase d.c. voltage to drive the pump
motor. It also evaluates measured signals and performs the following functions:
It provides logic to control the pump functions.
It operates the magnetic bearing system.
Figure 6 - SCU-350 control unit
The following series of turbomolecular pumps can be used in conjunction with the SCU-350.
Model Name Specification
STP-301/451 series High-vacuum type
STP-L301/L451 series Low-vibration type, High-vacuum type
Table 1 - Turbomolecular pumps