Edwards SCU-350 Series

SCU-350 Series Control Unit for Turbomolecular Pump
MT-21E-201-E
Page 57
4
OPERATION
4.5.7 Starting the STP pump after stopping (I/O TB2)
Perform the rotation procedures to reaccelerate the STP pump. See Section 4.5.6, "Starting/Stopping
the STP pump (I/O TB2)". The STP pump can be reaccelerated even while it is stopping.
4.5.8 Starting the STP pump after a safety function operates (I/O TB2)
A safety function operates when an abnormality occurs in the STP pump or peripheral equipment. To
restart the STP pump, remove the cause of the abnormality after the "BRAKE" LED distinguishes, and
perform either operation shown in Table 17. The "FAILURE" LED distinguishes and the safety function
is released (RESET operation). Then, start the STP pump. For the safety functions and troubleshooting,
see Section 5, " MAINTENANCE".
Method Reset operation
1
With the circuit between (2)-(3) shorted, short the circuit between (6)-(1)
(terminals for reset signal) for 0.3 seconds or more.
2
Input 25 V AC or 12 to 48 V DC between (6)-(3) (terminals for reset
signal) for 0.3 seconds or more. With DC, the (+) side can be connected
to either (3) or (6).
Table 17 - Reset operation during remote operation (I/O TB2)
4.5.9 Starting/Stopping the STP pump (CON4)
Starting the pump Stopping the pump
Input 24 V DC between (3)-(15) (pin for start
signal) for
0.3 seconds or more. Connect the (+) side to (3), and
the (-) side to (15). However, when inputting the signal
simultaneously with switching "ON" the breaker on the
rear panel, continue to short the circuit for 5
seconds or
more.
Input 24 V DC between (4)-(16) (pin for
stop signal) for 0.3 seconds or more. Connect
the (+) side to (4), and the (-) side to (16).
This STOP signal has priority over he
START signal.
Table 18 - Starting/Stopping the STP pump during remote operation (CON4)
Note: The STP pump can be started by remote operation with any message displayed on the LCD.
Note: Although the STP pump sounds for several seconds while it is accelerating, this is not an
indication of abnormality.
4.5.10 Starting the STP pump after stopping (CON4)
Perform the rotation procedures to reaccelerate the STP pump. See Section 4.5.9 "Starting/Stopping
the STP pump". The STP pump can be reaccelerated even while it is stopping.