Edwards SCU-350 Series

SCU-350 Series Control Unit for Turbomolecular Pump
MT-21E-201-E
Page 69
5
SERIAL COMMUNICATION PROTOCOL
5.4 Commands
A reply of "ERR 0" indicates that the command has been accepted but does not mean that the
command has operated. A program that needs positive verification needs to wait an appropriate time
and then perform a query.
5.4.1 List of commands
Command Syntax
Pump !P {0,1}
Reset !R {0,1}
5.4.1.1 Description of individual commands
1. !P x: Pump operation command
Syntax Description Reply
!P1 Start the STP pump ERR 0
!P0 Stop the STP pump ERR 0
2. !R x: Alarm Reset
Syntax Description Reply
!R1
Reset the alarm state of control
unit if the fault has removed.
ERR 0
!R0 No operation ERR 0
This command can work only the pump is in the levitation mode.
Note: Command "!R 0" has no meaning. Therefore, the SIM will send back "ERR 0".