Edwards SCU-350 Series

SCU-350 Series Control Unit for Turbomolecular Pump
MT-21E-201-E
Page 79
6
MAINTENANCE
6.1.11 Troubleshooting immediately after other abnormality/errors occur
WARNING
When disconnecting cables from the STP pump and/or the SCU-350 to perform
troubleshooting and take the necessary action, confirm that the STP pump has
stopped, power off the primary power (turn the MAIN POWER "OFF") and isolate
(Lockout/Tagout) the electrical energy source water and gas and other energy
sources on the vacuum equipment. Failure to do so may result in the inadvertent
rotation of the STP pump which may result in an accident, an electric shock or
damage to equipment. Moreover, an accident caused by water leaks or gas leak may
occur.
CAUTION
If the RESET operation does not extinguish the "FAILURE" LED, confirm that the STP pump has
stopped, turn OFF the primary power (Switch the MAIN POWER "OFF"), then turn ON the primary
power again (turn the MAIN POWER "ON").
Refer to see Section 4.4.4, "Starting the STP Pump after a safety function operates", Section 4.5.8,
"Starting the STP pump after a safety function operates (I/O TB2)", Section 4.5.11, "Starting the STP
pump after a safety function operates (CON4)".
After confirming the "BRAKE" LED has extinguished and the STP pump stops, remove the probable
cause of the abnormality. When the LCD displays an error message, take the necessary action
according to Table 26 to Table 29.
Perform the RESET operation, to turn off the "FAILURE" LED.
Perform the START operation. Check if the STP pump operates correctly.