Edwards SCU-350 Series

SCU-350 Series Control Unit for Turbomolecular Pump
MT-21E-201-E
Page 80
6
MAINTENANCE
Referred
section
3.8
3.
6.1
3.6.3
3.11
Instruction
Manual
(A)
Table
26
-
Error
m
essages after self
test
Countermeasures
1.
Connect the cable
correctly. If the cable connector is not locked, lock it securely.
2.
Contact Service office.
1.
Set the ambient
temperature to 40 ºC (104 ºF) or less.
2.
Remove obstacle from the
ventilation port. Contact Service office, if the air-cooling fan is failed.
1.
When changing the cable
length, perform tuning.
2.
Contact Service office.
1.
Remove external vibration
so as not to transmit it to the STP pump.
2.
Check the vacuum piping.
3.
Install the STP pump in a
way that no foreign matter falls into the STP pump.
Probable causes
1.
Disconnection of the STP
connection cable.
2.
Failure of the STP
connection cable.
1.
High ambient temperature.
2.
Insufficient cooling of the
SCU-350.
Abnormal magnetic bearing:
1.
Change of the cable
length.
2.
Disconnection of the STP
connection cable or control
circuit error.
Excessive vibration applied
externally to the STP
pump:
1.
External vibration/impact.
2.
Atmospheric air flows into
the STP pump.
3.
Foreign matter falls into
the STP pump.
Pump operation
No operation
Decele
rate and stop
Contact noise and
vibration of the rotor
are generated from
the STP
pump.
Decelerate and stop.
Occurrence condition
Abnormal
signal from STP
pump.
Overheat inside the
SCU
-350.
Excessive imbalance.
LCD Messages
CABLE
DISCONNECT
CONTROLLE
R OT
DISTURBANCE