Edwards SCU-350 Series

SCU-350 Series Control Unit for Turbomolecular Pump
MT-21E-201-E
Page 81
6
MAINTENANCE
Referred
section
Instruction
Manual
(B)
*1
The driver output stops and the rotor continues rotating by inertia. It may take several hours to stop. To stop the STP pump quickly, close the vacuum valve at the outlet port
flange and introduce gas from the purge port into the STP pump.
Table 27 - Error messages after self test (continued)
Countermeasures
Contact Service office.
Contact Service office.
1.
Contact Service office.
2.
Contact Service office.
Contact S
ervice office.
Contact Service office.
Contact Service office.
1.
Use the maximum working
pressure or less.
2.
Use the allowable backing
pressure or less.
3.
Check the vacuum piping
system for leakage.
4.
Check the backing-pump
for its capacity and START state. (use a backing-pump with
the recommended capacity
or more)
Contact Service office.
Probable causes
Failure of the SCU
-350.
STP
pump failure.
1.
Short of the STP
connection cable.
2.
STP pump failure.
Failure of the SCU
-350.
Failure of the SCU
-350.
Failure of the
SCU-350.
1.
High pressure at the inlet
port.
2.
High pressure at the outlet
port.
3.
Leakage of the piping
system.
4.
Failure of the
backing-pump.
Failure of the SCU
-350.
Pump operation
Free run
*1
Free run
*1
Free run
*1
Free run
*1
B
reaker trip
Decelerate and sto
p
D
ecelerate and stop
B
reaker trip
Occurrence condition
Failure of the driver circuit
.
Abnormal
hall censor
detection.
Driver over current.
Motor d
river overvoltage.
Pump overspeed
.
Motor driver voltage
reduction.
ACCELERATION state
continues for
approximat
ely 10 minutes.
Pump overspeed
LCD Messages
DRIVER ERROR 1
DRIVER ERROR 2
DRIVER ERROR 3
DRIVER ERROR 4
DRIVER ERROR 5
DRIVER ERROR 6
DRIVER HF
DRIVER OC
DRIVER O
V
DRIVER
RA
DRIVER
UV
OVERLOAD
OVERSPEED