Edwards SCU-350 Series

SCU-350 Series Control Unit for Turbomolecular Pump
MT-21E-201-E
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CONTENTS
Section Title Page
1 INTRODUCTION 1
1.1 Scope and definitions 1
1.2 Applied standards 2
1.3 Limited warranty 3
1.3.1 Warranty period 3
1.3.2 Item warranted 3
1.3.3 Disclaimer 3
1.3.4 Spare parts 4
1.4 Labels 4
1.5 Label affixing positions 6
1.6 General description 7
1.6.1 Cable sets 8
2 TECHNICAL DATA 9
2.1 Control unit specifications 9
2.2 SCU-350 specifications 10
2.3 External appearance of SCU-350 12
3 INSTALLATION 13
3.1 Unpacking 13
3.2 Front panel 13
3.3 Rear panel 15
3.4 Top panel 16
3.5 Left side panel 17
3.6 Precautions before installation 18
3.6.1 Operating environment 18
3.6.2 Installation area 19
3.7 Attaching the SCU-350 to a rack 20
3.8 Cable connection 21
3.8.1 STP connection cable 22
3.8.2 Power cable 23
3.9 Connecting to semiconductor equipment 27
3.9.1 Connecting to power 27
3.9.2 Emergency off circuit (EMO circuit) 27
3.10 Remote communication 28
3.10.1 Parallel communication 28
3.10.2 Parallel communication
(STP-200/300/400 series compatible communication） 28
3.10.3 Serial communication 29
3.11 Tuning 30
3.11.1 Tuning 30
3.11.2 Tuning method 30
3.12 Confirmation mode 32
3.12.1 Display items 32
3.12.2 Confirmation method 32
3.13 Setting the rated speed 33