Edwards SCU-350 Series

SCU-350 Series Control Unit for Turbomolecular Pump
MT-21E-201-E
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CONTENTS (CONTINUED)
Section Title Page
3.13.1 When setting DSW-B No. 1 to ON under power-on state 33
3.13.2 When setting DSW-B No. 1 to ON before powering ON 34
4 OPERATION 37
4.1 Before starting the STP pump 37
4.1.1 Confirmation before starting 37
4.1.2 Confirmation of vacuum system 37
4.2 Powering ON 38
4.2.1 Self test 38
4.3 How to start/stop the STP pump 38
4.4 Manual start/stop the STP pump 38
4.4.1 Starting the STP pump 38
4.4.2 Stopping the STP pump 39
4.4.3 Starting the STP pump after stopping 39
4.4.4 Starting the STP pump after a safety function operates 39
4.5 Remote operation 41
4.5.1 I/O TB2 terminal block 41
4.5.2 I/O TB1 terminal block 44
4.5.3 CON4 connector (for SCU-350H/350HA only) 49
4.5.3.1 Remote input signals 49
4.5.3.2 Remote output signals 52
4.5.4 Remote cables for CON4 (for SCU-350H/350HA only) 55
4.5.5 Remote setting 56
4.5.6 Starting/Stopping the STP pump (I/O TB2) 56
4.5.7 Starting the STP pump after stopping (I/O TB2) 57
4.5.8 Starting the STP pump
after a safety function operates (I/O TB2) 57
4.5.9 Starting/Stopping the STP pump (CON4) 57
4.5.10 Starting the STP pump after stopping (CON4) 57
4.5.11 Starting the STP pump
after a safety function operates (CON4) 58
4.6 Powering OFF 58
5 SERIAL COMMUNICATION PROTOCOL 59
5.1 Introduction 59
5.2 Setting up 59
5.2.1 Hardware Connections 59
5.2.2 Pin Assignments 61
5.2.3 Serial settings 61
5.2.4 Communication mode 62
5.2.5 Recommended items about communication cable installation 63
5.3 Serial Protocol 65
5.3.1 Overview 65
5.3.2 Sending a command or query to the SIM 65
5.3.3 SIM replies to queries or commands 66
5.3.4 Queries 67
5.3.4.1 List of Queries 67
5.3.4.2 Description of individual queries 67