Edwards SCU-350 Series

SCU-350 Series Control Unit for Turbomolecular Pump
MT-21E-201-E
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4
OPERATION
4.4.2 Stopping the STP pump
1. Press the "STOP" switch on the front panel to stop the STP pump.
2. The "NORMAL" LED or "ACCEL." LED extinguishes, and the "BRAKE" LED illuminates. (BRAKE
state)
3. When the rotational speed decreases to 500 rpm or less, the "BRAKE" LED extinguishes.
Note: The STP pump can be stopped with any message displayed in the LCD.
4.4.3 Starting the STP pump after stopping
1. Press the "START" switch on the front panel to accelerate the STP pump.
2. The STP pump can be accelerated even while it is stopping.
Note: Avoid frequent start/stop operations as this may cause the STP pump to overheat.
4.4.4 Starting the STP pump after a safety function operates
A safety function operates when an abnormality occurs in the STP pump or peripheral equipment. To
restart the STP pump, remove the cause of the abnormality after the "BRAKE" LED distinguishes, and
press the "RESET" switch. The "FAILURE" LED distinguishes and the safety function is released
(RESET operation). Then, press the "START" switch. For the safety functions and troubleshooting, see
Section 5, "MAINTENANCE".