Edwards SCU-350 Series

SCU-350 Series Control Unit for Turbomolecular Pump
MT-21E-201-E
Page 84
6
MAINTENANCE
6.2 When error message is not displayed on LCD
When the "FAILURE" LED illuminates and the LCD displays an error message, refer to Table 26 to
Table 29.
6.2.1 Abnormalities when powering ON
Symptom Probable cause Countermeasures Referred section
The "POWER"
LED does not
illuminate.
Incorrect connection of
power cable.
Connect the power cable
correctly.
Section 3.8.2
Abnormal power
voltage.
Set the voltage to rated voltage
10%.
Section 2.1
Section 3.8.2
Power failure. Check if a power failure has
occurred.
Section 5.1.1
Table 30 - Troubleshooting when powering ON
6.2.2 Abnormalities when performing rotational operation
Symptom Probable causes Countermeasures Referred section
The "ACCEL."
LED does not
illuminate.
LCD message
(MANUAL operation
only)
Press the "SELECT" switch one
or more times until the LCD
displays "LEVITATION" or
"BRAKE ***00rpm".
Section 4.4.1
The
"MANUAL/REMOTE"
changeover switch is
not at the correct
position.
Slide the "MANUAL/REMOTE"
changeover switch to the correct
position.
Section 3.2
Section 4.4
Section 4.5
Blown fuses (F1 to 4)
for remote signal
input (REMOTE
operation only)
Replace the blown fuses.
Contact
Service office.
Section 4.5.1
Incorrect setting of
DSW-B No.4 (only
with CON4)
Set the DSW-B No.4 to either
"ON/OFF" according to the
remote input connector/terminal.
Section 3.4
Section 4.5.1
Section 4.5.3
Section 4.5.5
Table 31 - Troubleshooting when performing the STP pump start operation